VLS法ならびにその変形法によるシリコン結晶の成長


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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/41996

Title:	VLS法ならびにその変形法によるシリコン結晶の成長
Other Titles:	Growth of Silicon Crystals by VLS-Method and its Modification
Authors:	新谷, 光二¹ Browse this author
	山本, 克郎² Browse this author
	長崎, 隆吉³ Browse this author
Authors(alt):	Atarashiya, Koji¹
	Yamamoto, Katsuro²
	Nagasaki, Ryukichi³
Issue Date:	31-Jul-1986
Publisher:	北海道大学
Journal Title:	北海道大學工學部研究報告
Journal Title(alt):	Bulletin of the Faculty of Engineering, Hokkaido University
Volume:	132
Start Page:	161
End Page:	171
Type:	bulletin (article)
URI:	http://hdl.handle.net/2115/41996
Appears in Collections:	北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.132

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