|
Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.132 >
四重極質量分析計を用いたプロセスガス分析法の開発
| Title: | 四重極質量分析計を用いたプロセスガス分析法の開発 |
| Other Titles: | Development of Process Gas Analysis by using Quadrupole Mass Spectrometer |
| Authors: | 石井, 邦宜1 Browse this author | | 秋山, 友宏2 Browse this author | | 柏谷, 悦章3 Browse this author | | 近藤, 真一4 Browse this author |
| Authors(alt): | Ishii, Kuniyoshi1 | | Akiyama, Tomohiro2 | | Kashiwaya, Yoshiaki3 | | Kondo, Shin-ichi4 |
| Issue Date: | 31-Jul-1986 |
| Publisher: | 北海道大学 |
| Journal Title: | 北海道大學工學部研究報告 |
| Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
| Volume: | 132 |
| Start Page: | 21 |
| End Page: | 30 |
| Type: | bulletin (article) |
| URI: | http://hdl.handle.net/2115/42004 |
| Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.132
|
|
