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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.133 >

反応性スパッタ・エッチングの研究 : 各種ガスの鋼加工特性について

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/42017

Title: 反応性スパッタ・エッチングの研究 : 各種ガスの鋼加工特性について
Other Titles: A Study of Reactive Sputter Etching : On the Etching Characteristics of Carbon Steel by using various gases
Authors: 勇田, 敏夫1 Browse this author
小山内, 潤2 Browse this author
佐藤, 敏一3 Browse this author
高橋, 達男4 Browse this author
Authors(alt): Yuhta, Toshio1
Osanai, Jun2
Satoh, Toshikazu3
Takahashi, Tatsuo4
Issue Date: 31-Oct-1986
Publisher: 北海道大学
Journal Title: 北海道大學工學部研究報告
Journal Title(alt): Bulletin of the Faculty of Engineering, Hokkaido University
Volume: 133
Start Page: 39
End Page: 46
Type: bulletin (article)
URI: http://hdl.handle.net/2115/42017
Appears in Collections:北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.133

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