フォトルミネセンス法によるシリコン表面の表面再結合速度の評価


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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/42365

Title:	フォトルミネセンス法によるシリコン表面の表面再結合速度の評価
Other Titles:	Measurement of Surface Recombination Velocity of Si Surface by Photoluminescence Method
Authors:	西本, 陽一郎¹ Browse this author
	斉藤, 俊也² Browse this author
	長谷川, 英機³ Browse this author
Authors(alt):	Nishimoto, Yoichiro¹
	Saitoh, Toshiya²
	Hasegawa, Hideki³
Issue Date:	28-May-1993
Publisher:	北海道大学
Journal Title:	北海道大學工學部研究報告
Journal Title(alt):	Bulletin of the Faculty of Engineering, Hokkaido University
Volume:	164
Start Page:	31
End Page:	40
Type:	bulletin (article)
URI:	http://hdl.handle.net/2115/42365
Appears in Collections:	北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.164

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