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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.174 >
集束イオンビームの探針加工への応用
Title: | 集束イオンビームの探針加工への応用 |
Other Titles: | Study of Focused Ion Beams for Probe Tip Milling |
Authors: | 佐々木, 泰1 Browse this author | 末岡, 和久2 Browse this author | 岩田, 達夫3 Browse this author | 宮尾, 正大4 Browse this author | 安達, 洋5 Browse this author | 早川, 和延6 Browse this author | 武笠, 幸一7 Browse this author |
Authors(alt): | Sasaki, Yasushi1 | Sueoka, Kazuhisa2 | Iwata, Tatsuo3 | Miyao, Masahiro4 | Adachi, Hiroshi5 | Hayakawa, Kazunobu6 | Mukasa, Koichi7 |
Issue Date: | 28-Jul-1995 |
Publisher: | 北海道大学 |
Journal Title: | 北海道大學工學部研究報告 |
Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
Volume: | 174 |
Start Page: | 41 |
End Page: | 47 |
Type: | bulletin (article) |
URI: | http://hdl.handle.net/2115/42448 |
Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.174
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