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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.174 >

集束イオンビームの探針加工への応用

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/42448

Title: 集束イオンビームの探針加工への応用
Other Titles: Study of Focused Ion Beams for Probe Tip Milling
Authors: 佐々木, 泰1 Browse this author
末岡, 和久2 Browse this author
岩田, 達夫3 Browse this author
宮尾, 正大4 Browse this author
安達, 洋5 Browse this author
早川, 和延6 Browse this author
武笠, 幸一7 Browse this author
Authors(alt): Sasaki, Yasushi1
Sueoka, Kazuhisa2
Iwata, Tatsuo3
Miyao, Masahiro4
Adachi, Hiroshi5
Hayakawa, Kazunobu6
Mukasa, Koichi7
Issue Date: 28-Jul-1995
Publisher: 北海道大学
Journal Title: 北海道大學工學部研究報告
Journal Title(alt): Bulletin of the Faculty of Engineering, Hokkaido University
Volume: 174
Start Page: 41
End Page: 47
Type: bulletin (article)
URI: http://hdl.handle.net/2115/42448
Appears in Collections:北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.174

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