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Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.174 >
集束イオンビームの探針加工への応用
| Title: | 集束イオンビームの探針加工への応用 |
| Other Titles: | Study of Focused Ion Beams for Probe Tip Milling |
| Authors: | 佐々木, 泰1 Browse this author | | 末岡, 和久2 Browse this author | | 岩田, 達夫3 Browse this author | | 宮尾, 正大4 Browse this author | | 安達, 洋5 Browse this author | | 早川, 和延6 Browse this author | | 武笠, 幸一7 Browse this author |
| Authors(alt): | Sasaki, Yasushi1 | | Sueoka, Kazuhisa2 | | Iwata, Tatsuo3 | | Miyao, Masahiro4 | | Adachi, Hiroshi5 | | Hayakawa, Kazunobu6 | | Mukasa, Koichi7 |
| Issue Date: | 28-Jul-1995 |
| Publisher: | 北海道大学 |
| Journal Title: | 北海道大學工學部研究報告 |
| Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
| Volume: | 174 |
| Start Page: | 41 |
| End Page: | 47 |
| Type: | bulletin (article) |
| URI: | http://hdl.handle.net/2115/42448 |
| Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.174
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