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Development of microfabricated TiO2 channel waveguides
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| Title: | Development of microfabricated TiO2 channel waveguides |
| Authors: | Furuhashi, Masayuki Browse this author | | Fujiwara, Masazumi Browse this author →KAKEN DB | | Ohshiro, Takahito Browse this author | | Tsutsui, Makusu Browse this author | | Matsubara, Kazuki Browse this author | | Taniguchi, Masateru Browse this author | | Takeuchi, Shigeki Browse this author →KAKEN DB | | Kawai, Tomoji Browse this author |
| Keywords: | integrated optics | | microfabrication | | micro-optomechanical devices | | optical fabrication | | optical losses | | optical waveguides | | refractive index | | titanium compounds | | transparency |
| Issue Date: | Sep-2011 |
| Publisher: | American Institute of Physics |
| Journal Title: | AIP Advances |
| Volume: | 1 |
| Issue: | 3 |
| Start Page: | 032102 |
| Publisher DOI: | 10.1063/1.3615716 |
| Abstract: | An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO2 channel waveguides with 1-20 μm width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dB/cm. |
| Rights: | http://creativecommons.org/licenses/by/3.0/ |
| Type: | article |
| URI: | http://hdl.handle.net/2115/49857 |
| Appears in Collections: | 電子科学研究所 (Research Institute for Electronic Science) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 竹内 繁樹
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