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Development of microfabricated TiO2 channel waveguides

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Title: Development of microfabricated TiO2 channel waveguides
Authors: Furuhashi, Masayuki Browse this author
Fujiwara, Masazumi Browse this author →KAKEN DB
Ohshiro, Takahito Browse this author
Tsutsui, Makusu Browse this author
Matsubara, Kazuki Browse this author
Taniguchi, Masateru Browse this author
Takeuchi, Shigeki Browse this author →KAKEN DB
Kawai, Tomoji Browse this author
Keywords: integrated optics
micro-optomechanical devices
optical fabrication
optical losses
optical waveguides
refractive index
titanium compounds
Issue Date: Sep-2011
Publisher: American Institute of Physics
Journal Title: AIP Advances
Volume: 1
Issue: 3
Start Page: 032102
Publisher DOI: 10.1063/1.3615716
Abstract: An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO2 channel waveguides with 1-20 μm width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dB/cm.
Type: article
Appears in Collections:電子科学研究所 (Research Institute for Electronic Science) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 竹内 繁樹

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