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Ultrahigh Vacuum Contactless Capacitance-Voltage Characterization of Clean and Passivated Silicon Surfaces
| Title: | Ultrahigh Vacuum Contactless Capacitance-Voltage Characterization of Clean and Passivated Silicon Surfaces |
| Other Titles: | 超高真空対応非接触容量 : 電圧法によるシリコンの清浄表面と不活性化表面の評価 |
| Authors: | Yoshida, Toshiyuki1 Browse this author |
| Authors(alt): | 吉田, 俊幸1 |
| Issue Date: | 23-Mar-2001 |
| Publisher: | Hokkaido University |
| Conffering University: | 北海道大学 |
| Degree Report Number: | 甲第5529号 |
| Degree Level: | 博士 |
| Degree Discipline: | 工学 |
| Type: | theses (doctoral) |
| URI: | http://hdl.handle.net/2115/51502 |
| Appears in Collections: | 学位論文 (Theses) > 博士 （工学）
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Submitter: 吉田 俊幸
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