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Ultrahigh Vacuum Contactless Capacitance-Voltage Characterization of Clean and Passivated Silicon Surfaces
Title: | Ultrahigh Vacuum Contactless Capacitance-Voltage Characterization of Clean and Passivated Silicon Surfaces |
Other Titles: | 超高真空対応非接触容量 : 電圧法によるシリコンの清浄表面と不活性化表面の評価 |
Authors: | Yoshida, Toshiyuki1 Browse this author |
Authors(alt): | 吉田, 俊幸1 |
Issue Date: | 23-Mar-2001 |
Publisher: | Hokkaido University |
Conffering University: | 北海道大学 |
Degree Report Number: | 甲第5529号 |
Degree Level: | 博士 |
Degree Discipline: | 工学 |
Type: | theses (doctoral) |
URI: | http://hdl.handle.net/2115/51502 |
Appears in Collections: | 学位論文 (Theses) > 博士 (工学)
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Submitter: 吉田 俊幸
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