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Ultrahigh Vacuum Contactless Capacitance-Voltage Characterization of Clean and Passivated Silicon Surfaces

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Please use this identifier to cite or link to this item:https://doi.org/10.11501/3182381

Title: Ultrahigh Vacuum Contactless Capacitance-Voltage Characterization of Clean and Passivated Silicon Surfaces
Other Titles: 超高真空対応非接触容量 : 電圧法によるシリコンの清浄表面と不活性化表面の評価
Authors: Yoshida, Toshiyuki1 Browse this author
Authors(alt): 吉田, 俊幸1
Issue Date: 23-Mar-2001
Conffering University: 北海道大学
Degree Report Number: 甲第5529号
Degree Level: 博士
Degree Discipline: 工学
Type: theses (doctoral)
URI: http://hdl.handle.net/2115/51502
Appears in Collections:学位論文 (Theses) > 博士 (工学)

Submitter: 吉田 俊幸

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