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Low-temperature fabrication of fine structures on glass using electrical nanoimprint and chemical etching
| Title: | Low-temperature fabrication of fine structures on glass using electrical nanoimprint and chemical etching |
| Authors: | Ikutame, Naoki Browse this author | | Kawaguchi, Keiga Browse this author | | Ikeda, Hiroshi Browse this author | | Sakai, Daisuke Browse this author | | Harada, Kenji Browse this author →KAKEN DB | | Funatsu, Shiro Browse this author | | Nishii, Junji Browse this author →KAKEN DB |
| Issue Date: | 28-Aug-2013 |
| Publisher: | American Institute of Physics |
| Journal Title: | Journal of applied physics |
| Volume: | 114 |
| Issue: | 8 |
| Start Page: | 083514-1 |
| End Page: | 083514-4 |
| Publisher DOI: | 10.1063/1.4819321 |
| Abstract: | Periodic structures were imprinted on a soda lime glass surface below its glass transition temperature (T-g) using a carbon-coated SiO2 mold under application of DC voltage. The structure height increased with the applied DC voltage, although no significant increase with pressure was found. At a temperature around T-g, the height reached saturation. Chemical etching using 55% KOH solution at 70 degrees C increased the structure height to eight times the height before etching. Noticeable alternating depression patterns and rapid chemical etching are closely related with the selective decrease in sodium concentration, which occurred only in the surface areas that were pressurized by the mold. (C) 2013 AIP Publishing LLC. |
| Rights: | Copyright 2013 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
The following article appeared in Journal of Applied Physics 114, 083514 (2013) and may be found at http://scitation.aip.org/content/aip/journal/jap/114/8/10.1063/1.4819321 |
| Type: | article |
| URI: | http://hdl.handle.net/2115/53435 |
| Appears in Collections: | 電子科学研究所 (Research Institute for Electronic Science) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 酒井 大輔
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