Studies on Photoacid Generators for the Next-generation Photolithography


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Please use this identifier to cite or link to this item:https://doi.org/10.14943/doctoral.k11581

Related Items in HUSCAP:

Title:	Studies on Photoacid Generators for the Next-generation Photolithography
Other Titles:	次世代フォトリソグラフィーのための光酸発生剤の研究
Authors:	朝倉, 敏景 Browse this author
Issue Date:	25-Sep-2014
Publisher:	Hokkaido University
Conffering University:	北海道大学
Degree Report Number:	甲第11581号
Degree Level:	博士
Degree Discipline:	理学
Examination Committee Members:	(主査) 教授佐田和己, 教授福岡淳, 教授長谷川靖哉, 教授中野環, 准教授小山靖人
Degree Affiliation:	総合化学院（総合化学専攻）
Type:	theses (doctoral)
URI:	http://hdl.handle.net/2115/59838
Appears in Collections:	学位論文 (Theses) > 博士　（理学）課程博士 (Doctorate by way of Advanced Course) > 総合化学院(Graduate School of Chemical Sciences and Engineering)

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