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大植, 英司
;
赤沢, 正道
;
児玉, 聡
;
長谷川, 英機
シリコン超薄膜を用いたInGaAsの表面不活性化とその応用
A New Surface Passivation Method of InGaAs Using a Si Ultrathin Layer and Its Application
北海道大學工學部研究報告
Bulletin of the Faculty of Engineering, Hokkaido University
20-Jul-1991
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