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TypeAuthor(s)TitleOther TitlesCitationCitation(alt)Issue Date
bulletin (article)下妻, 光夫; 石川, 基博; 田頭, 博昭50HzプラズマCVD法による高分子材料上へのシリコン酸化膜生成Deposition of Silicon Oxide Film on Polymer Substrade Using 50Hz Plasma CVD Method北海道大学医療技術短期大学部紀要-Dec-1992
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