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TypeAuthor(s)TitleOther TitlesCitationCitation(alt)Issue Date
article (author version)Shimabayashi, Masaharu; Kurihara, Kazuaki; Horikawa, Yoshimine; Sasaki, KoichiNitriding characteristics of 4H-SiC irradiated with remote nitrogen plasmas-Japanese Journal of Applied Physics (JJAP)-Mar-2016
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