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下妻, 光夫
;
Lasorsa, Carlos
;
Rodrigo, Adolfo
DCプラズマCVD法による3次元基板上へのTiN膜生成 : アルゼンチン共和国へのプラズマプロセシング技術協力
Deposition of TiN Film on the Three-Dimensional Substrate Using DC Plasma CVD Method : Technical Cooperation for Plasma Processing of Industrial Materials in the Argentine Republic
北海道大学医療技術短期大学部紀要
-
Dec-1995
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