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TypeAuthor(s)TitleOther TitlesCitationCitation(alt)Issue Date
article (author version)Hino, T.; Taguchi, T.; Yamauchi, Y.; Hirohata, Y.; Nishikawa, M.Surface flatness of polycrystalline copper after argon ion etching followed by annealing-Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures-4-Nov-2004
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