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Micro-patterning in anodic oxide film on aluminium by laser irradiation

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/25156

Title: Micro-patterning in anodic oxide film on aluminium by laser irradiation
Authors: Jha, H. Browse this author
Kikuchi, T. Browse this author →KAKEN DB
Sakairi, M. Browse this author →KAKEN DB
Takahashi, H. Browse this author
Keywords: Anodizing
Pore sealing
Laser patterning
Microchannel
μ-TAS
MEMS
Issue Date: 1-Apr-2007
Publisher: Elsevier
Journal Title: Electrochimica Acta
Volume: 52
Issue: 14
Start Page: 4724
End Page: 4733
Publisher DOI: 10.1016/j.electacta.2007.01.008
Abstract: Microstructures such as microchannels and microchambers were fabricated on anodic oxide film of aluminium with laser direct patterning technique. The aluminium substrate covered with porous type anodic oxide film was dyed with organic dyes followed by hydrothermal treatment. The coloured and pore sealed film shows much higher absorption then as-formed porous film, that makes possible to pattern various types of microstructures on the film by removing the upper part of the film surface by laser irradiation. Structure of the crystallized hydroxide layer on the surface of the anodic oxide film, formed during pore sealing, as well as the partial removal of anodic oxide film from the surface is described. Microstructures with depth lower than 1–27 μm were patterned successfully on 16 and 32 μm thick anodic oxide film surfaces, using various combinations of laser power and laser scanning speed. The affect of the laser scanning speed and laser power density on the shape of the microstructures is also explained.
Relation: http://www.sciencedirect.com/science/journal/00134686
Type: article (author version)
URI: http://hdl.handle.net/2115/25156
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: Jha, Himendra

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