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Micro-patterning in anodic oxide film on aluminium by laser irradiation

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タイトル: Micro-patterning in anodic oxide film on aluminium by laser irradiation
著者: Jha, H. 著作を一覧する
Kikuchi, T. 著作を一覧する
Sakairi, M. 著作を一覧する
Takahashi, H. 著作を一覧する
キーワード: Anodizing
Pore sealing
Laser patterning
Microchannel
μ-TAS
MEMS
発行日: 2007年 4月 1日
出版者: Elsevier
誌名: Electrochimica Acta
巻: 52
号: 14
開始ページ: 4724
終了ページ: 4733
出版社 DOI: 10.1016/j.electacta.2007.01.008
抄録: Microstructures such as microchannels and microchambers were fabricated on anodic oxide film of aluminium with laser direct patterning technique. The aluminium substrate covered with porous type anodic oxide film was dyed with organic dyes followed by hydrothermal treatment. The coloured and pore sealed film shows much higher absorption then as-formed porous film, that makes possible to pattern various types of microstructures on the film by removing the upper part of the film surface by laser irradiation. Structure of the crystallized hydroxide layer on the surface of the anodic oxide film, formed during pore sealing, as well as the partial removal of anodic oxide film from the surface is described. Microstructures with depth lower than 1–27 μm were patterned successfully on 16 and 32 μm thick anodic oxide film surfaces, using various combinations of laser power and laser scanning speed. The affect of the laser scanning speed and laser power density on the shape of the microstructures is also explained.
Relation (URI): http://www.sciencedirect.com/science/journal/00134686
資料タイプ: article (author version)
URI: http://hdl.handle.net/2115/25156
出現コレクション:雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

提供者: Jha, Himendra

 

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