Local probing of thermal properties at submicron depths with megahertz photothermal vibrations


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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/28033

Title:	Local probing of thermal properties at submicron depths with megahertz photothermal vibrations
Authors:	Tomoda, M. Browse this author →KAKEN DB
	Shiraishi, N. Browse this author
	Kolosov, O. V. Browse this author
	Wright, O. B. Browse this author
Issue Date:	27-Jan-2003
Publisher:	American Institute of Physics
Journal Title:	Applied Physics Letters
Volume:	82
Issue:	4
Start Page:	622
End Page:	624
Publisher DOI:	10.1063/1.1539906
Abstract:	We demonstrate the imaging of buried features in a microstructure -- a tiny hole in an aluminum thin film covered by a chromium layer -- with nanometer lateral resolution using a transient temperature distribution restricted to within ~0.5 µm of the sample surface. This is achieved by mapping photothermally induced megahertz surface vibrations in an atomic force microscope. Local thermal probing with megahertz-frequency thermal waves is thus shown to be a viable method for imaging subsurface thermal features at submicron depths.
Rights:	Copyright © 2003 American Institute of Physics.
Relation:	http://apl.aip.org/apl/
Type:	article
URI:	http://hdl.handle.net/2115/28033
Appears in Collections:	工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 友田基信

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