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Microfabrication of an anodic oxide film by anodizing laser-textured aluminium

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タイトル: Microfabrication of an anodic oxide film by anodizing laser-textured aluminium
著者: Jha, Himendra 著作を一覧する
Kikuchi, Tatsuya 著作を一覧する
Sakairi, Masatoshi 著作を一覧する
Takahashi, Hideaki 著作を一覧する
発行日: 2007年10月
出版者: IOP Institute of Physics
誌名: Journal of Micromechanics and Microengineering
巻: 17
号: 10
開始ページ: 1949
終了ページ: 1955
出版社 DOI: 10.1088/0960-1317/17/10/004
抄録: A simple method for the fabrication of microstructures of an aluminium anodic oxide film (anodic alumina) by anodizing laser-textured aluminium is demonstrated. In the process, the aluminium substrate was first textured by a low power laser beam, and then the textured aluminium was subjected to anodizing, to develop a continuous, thick porous layer on the textured surface. Microstructures with a depth of a few to several tens of micrometres were fabricated successfully on the anodic oxide film by using various combinations of laser power density and laser scanning speed. Removing the film from the aluminium substrate enables the fabrication of various 2D and 3D microstructures from anodic alumina.
Rights: Copyright © 2007 IOP Publishing Ltd.
Relation (URI):
資料タイプ: article (author version)
出現コレクション:雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

提供者: Jha, Himendra


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