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Microfabrication of an anodic oxide film by anodizing laser-textured aluminium

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Title: Microfabrication of an anodic oxide film by anodizing laser-textured aluminium
Authors: Jha, Himendra Browse this author
Kikuchi, Tatsuya Browse this author →KAKEN DB
Sakairi, Masatoshi Browse this author →KAKEN DB
Takahashi, Hideaki Browse this author
Issue Date: Oct-2007
Publisher: IOP Institute of Physics
Journal Title: Journal of Micromechanics and Microengineering
Volume: 17
Issue: 10
Start Page: 1949
End Page: 1955
Publisher DOI: 10.1088/0960-1317/17/10/004
Abstract: A simple method for the fabrication of microstructures of an aluminium anodic oxide film (anodic alumina) by anodizing laser-textured aluminium is demonstrated. In the process, the aluminium substrate was first textured by a low power laser beam, and then the textured aluminium was subjected to anodizing, to develop a continuous, thick porous layer on the textured surface. Microstructures with a depth of a few to several tens of micrometres were fabricated successfully on the anodic oxide film by using various combinations of laser power density and laser scanning speed. Removing the film from the aluminium substrate enables the fabrication of various 2D and 3D microstructures from anodic alumina.
Rights: Copyright © 2007 IOP Publishing Ltd.
Type: article (author version)
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: Jha, Himendra

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