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Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
Peer-reviewed Journal Articles, etc >
無電解めっきとレーザー照射による有機樹脂板上へのCuマイクロパターン形成
| Title: | 無電解めっきとレーザー照射による有機樹脂板上へのCuマイクロパターン形成 |
| Other Titles: | Fabrication of Cu micro-pattern on organic resin board by electroless plating and laser irradiation |
| Authors: | 菊地, 竜也1 Browse this author →KAKEN DB | | 和智, 悠太2 Browse this author | | 坂入, 正敏3 Browse this author →KAKEN DB | | 高橋, 英明4 Browse this author | | 飯野, 潔5 Browse this author | | 片山, 直樹6 Browse this author |
| Authors(alt): | Kikuchi, Tatsuya1 | | Wachi, Yuta2 | | Sakairi, Masatoshi3 | | Takahashi, Hideaki4 | | Iino, Kiyoshi5 | | Katayama, Naoki6 |
| Keywords: | electroless plating | | laser irradiation | | micromachining | | printed circuit board |
| Issue Date: | Aug-2008 |
| Publisher: | 表面技術協会 |
| Journal Title: | 表面技術 |
| Volume: | 59 |
| Issue: | 8 |
| Start Page: | 555 |
| End Page: | 561 |
| Abstract: | Printed circuit board with a Cu fine pattern was fabricated by electroless plating and laser irradiation. A glass fiber-reinforced epoxy resin plate was immersed in a Pd2+ containing solution, and then Cu metal layer was deposited on the epoxy resin by Cu electroless plating. After Cu plating, the Cu deposited specimen was irradiated with a pulsed Nd-YAG laser in air or doubly distilled water through an iris diaphragm and a convex lens to remove the Cu layer locally. The width of the Cu removed area in creased with increasing laser power and with decreasing scanning rate of the laser beam. In the case of laser irradiation in doubly distilled water, the Cu layer around the laser irradiated-area was rolled up to form less precise patterns. Fine Cu-pattern coils with 60μm width and 20μm intervals were fabricated on the epoxy resin by laser irradiation in air. |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/36647 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 菊地 竜也
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