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Error-reduced channeled spectroscopic ellipsometer with palm-size sensing head

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Title: Error-reduced channeled spectroscopic ellipsometer with palm-size sensing head
Authors: Okabe, Hiroshi Browse this author
Hayakawa, Masayuki Browse this author
Matoba, Junichi Browse this author
Naito, Hitoshi Browse this author
Oka, Kazuhiko Browse this author →KAKEN DB
Keywords: dielectric thin films
silicon compounds
Issue Date: Aug-2009
Publisher: American Institute of Physics
Journal Title: Review of Scientific Instruments
Volume: 80
Issue: 8
Start Page: 083104
Publisher DOI: 10.1063/1.3206346
Abstract: This paper describes a newly developed prototype system of the channeled spectroscopic ellipsometer (CSE). The new system has a feature that the major systematic and random error sources of the previous CSEs are effectively reduced or compensated for. In addition, the prototype preserves the advantageous features of the CSE in that it has a palm-size sensing head and that its acquisition time is as fast as 20 ms. Its performance is experimentally examined by use of 12 films whose thicknesses are ranging approximately from 3 to 4000 nm. The film thicknesses measured by the new CSE show good agreements with the ones by the rotating-compensator spectroscopic ellipsometer. The stability of the film-thickness measurement of the new CSE against the temperature change from 5 to 45℃ is less than 0.11 nm. The CSE can open up new applications of the spectroscopic ellipsometers in which the compactness, the simplicity, and the rapid response are important.
Rights: Copyright 2009 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Rev. Sci. Instrum. 80, 083104 (2009) and may be found at
Type: article
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 岡 和彦

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