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Title: ポリピロール/金の2層構造を有する3次元マイクロアクチュエーターの作製
Other Titles: Fabrication of three-dimensional micro-actuators with polypyrrole / gold bi-layer structure
Authors: 菊地, 竜也1 Browse this author →KAKEN DB
上田, 晋吾2 Browse this author
上田, 幹人3 Browse this author →KAKEN DB
坂入, 正敏4 Browse this author →KAKEN DB
高橋, 英明5 Browse this author
Authors(alt): Kikuchi, Tatsuya1
Ueda, Shingo2
Ueda, Mikito3
Sakairi, Masatoshi4
Takahashi, Hideaki5
Keywords: Micro-actuator
Laser Irradiation
Issue Date: May-2009
Publisher: 表面技術協会
Journal Title: 表面技術
Journal Title(alt): Journal of the Surface Finishing Society of Japan
Volume: 60
Issue: 5
Start Page: 335
End Page: 341
Abstract: Three-dimensional micro-actuators, consisting of a polypyrrole (PPy)/Au bi-layer, were fabricated by Al anodizing, laser irradiation, and electrochemical techniques. Aluminum specimens covered with porous type oxide films were irradiated with a pulsed Nd-YAG laser to locally remove the oxide films, and then an Au layer and a PPy layer were deposited at the area where the film had been removed. Finally, the specimens were immersed in a NaOH solution after connecting with/without a Pt plate to separate PPy/Au actuators from the Al substrate and anodic oxide film. The PPy layer didn’t lose its electro-conductivity when the specimen was immersed in NaOH solution after connecting with a Pt plate, while the conductivity was lost after immersion of the specimen alone. The immersion with Pt connecting suppressed the reduction of PPy, and enabled the fabrication of PPy/Au actuators. Three-dimensional PPy/Au bi-layer micro-actuators were successfully fabricated using column Al specimens, and much flexible than PPy/Au/resin three-layer actuators reported in a previous paper.
Type: article (author version)
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 菊地 竜也

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