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ポリピロール/金の2層構造を有する3次元マイクロアクチュエーターの作製
Title: | ポリピロール/金の2層構造を有する3次元マイクロアクチュエーターの作製 |
Other Titles: | Fabrication of three-dimensional micro-actuators with polypyrrole / gold bi-layer structure |
Authors: | 菊地, 竜也1 Browse this author →KAKEN DB | 上田, 晋吾2 Browse this author | 上田, 幹人3 Browse this author →KAKEN DB | 坂入, 正敏4 Browse this author →KAKEN DB | 高橋, 英明5 Browse this author |
Authors(alt): | Kikuchi, Tatsuya1 | Ueda, Shingo2 | Ueda, Mikito3 | Sakairi, Masatoshi4 | Takahashi, Hideaki5 |
Keywords: | Micro-actuator | Polypyrrole | Aluminum | Anodizing | Laser Irradiation |
Issue Date: | May-2009 |
Publisher: | 表面技術協会 |
Journal Title: | 表面技術 |
Journal Title(alt): | Journal of the Surface Finishing Society of Japan |
Volume: | 60 |
Issue: | 5 |
Start Page: | 335 |
End Page: | 341 |
Abstract: | Three-dimensional micro-actuators, consisting of a polypyrrole (PPy)/Au bi-layer, were fabricated by Al anodizing, laser irradiation, and electrochemical techniques. Aluminum specimens covered with porous type oxide films were irradiated with a pulsed Nd-YAG laser to locally remove the oxide films, and then an Au layer and a PPy layer were deposited at the area where the film had been removed. Finally, the specimens were immersed in a NaOH solution after connecting with/without a Pt plate to separate PPy/Au actuators from the Al substrate and anodic oxide film. The PPy layer didn’t lose its electro-conductivity when the specimen was immersed in NaOH solution after connecting with a Pt plate, while the conductivity was lost after immersion of the specimen alone. The immersion with Pt connecting suppressed the reduction of PPy, and enabled the fabrication of PPy/Au actuators. Three-dimensional PPy/Au bi-layer micro-actuators were successfully fabricated using column Al specimens, and much flexible than PPy/Au/resin three-layer actuators reported in a previous paper. |
Type: | article (author version) |
URI: | http://hdl.handle.net/2115/40016 |
Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 菊地 竜也
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