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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.112 >

エリプソ・インタフェロメトリにおける多重反射と回折の影響

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/41768

Title: エリプソ・インタフェロメトリにおける多重反射と回折の影響
Other Titles: Effects of Multiple Reflection and Diffraction on Lateral Resolution of Ellipso-Interferometry
Authors: 三島, 瑛人1 Browse this author
佐藤, 邦宏2 Browse this author
伊藤, 泰宏3 Browse this author
桜庭, 一郎4 Browse this author
Authors(alt): Mishima, Teruhito1
Satoh, Kunihiro2
Itoh, Yasuhiro3
Sakuraba, Ichiro4
Issue Date: 31-Jan-1983
Publisher: 北海道大学
Journal Title: 北海道大學工學部研究報告
Journal Title(alt): Bulletin of the Faculty of Engineering, Hokkaido University
Volume: 112
Start Page: 57
End Page: 67
Type: bulletin (article)
URI: http://hdl.handle.net/2115/41768
Appears in Collections:北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.112

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