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Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.170 >
半絶縁性基板の表面電気伝導および表面不活性化
| Title: | 半絶縁性基板の表面電気伝導および表面不活性化 |
| Other Titles: | Electrical Conduction Near Surface of Semi-Insulating Substrate and Its Surface Passivation |
| Authors: | 佐々木, 恵二1 Browse this author | | 赤沢, 正道2 Browse this author | | 塩原, 俊助3 Browse this author | | 長谷川, 英機4 Browse this author |
| Authors(alt): | Sasaki, Keiji1 | | Akazawa, Masamichi2 | | Shiobara, Syunsuke3 | | Hasegawa, Hideki4 |
| Issue Date: | 29-Jul-1994 |
| Publisher: | 北海道大学 |
| Journal Title: | 北海道大學工學部研究報告 |
| Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
| Volume: | 170 |
| Start Page: | 35 |
| End Page: | 43 |
| Type: | bulletin (article) |
| URI: | http://hdl.handle.net/2115/42433 |
| Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.170
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