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北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University >
No.170 >
半絶縁性基板の表面電気伝導および表面不活性化
Title: | 半絶縁性基板の表面電気伝導および表面不活性化 |
Other Titles: | Electrical Conduction Near Surface of Semi-Insulating Substrate and Its Surface Passivation |
Authors: | 佐々木, 恵二1 Browse this author | 赤沢, 正道2 Browse this author | 塩原, 俊助3 Browse this author | 長谷川, 英機4 Browse this author |
Authors(alt): | Sasaki, Keiji1 | Akazawa, Masamichi2 | Shiobara, Syunsuke3 | Hasegawa, Hideki4 |
Issue Date: | 29-Jul-1994 |
Publisher: | 北海道大学 |
Journal Title: | 北海道大學工學部研究報告 |
Journal Title(alt): | Bulletin of the Faculty of Engineering, Hokkaido University |
Volume: | 170 |
Start Page: | 35 |
End Page: | 43 |
Type: | bulletin (article) |
URI: | http://hdl.handle.net/2115/42433 |
Appears in Collections: | 北海道大学工学部研究報告 = Bulletin of the Faculty of Engineering, Hokkaido University > No.170
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