Numerical simulation of electron transport in electric and magnetic fields for analysis of electron temperature and number density profiles measured in an argon magnetic neutral loop discharge plasma

SUGAWARA, Hirotake; OSAGA, Tsuyoshi; TSUBOI, Hideo; KUWAHARA, Kiyoshi; OGATA, Seiji

doi:10.1143/JJAP.49.086001


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Numerical simulation of electron transport in electric and magnetic fields for analysis of electron temperature and number density profiles measured in an argon magnetic neutral loop discharge plasma

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Title:	Numerical simulation of electron transport in electric and magnetic fields for analysis of electron temperature and number density profiles measured in an argon magnetic neutral loop discharge plasma
Authors:	SUGAWARA, Hirotake Browse this author
	OSAGA, Tsuyoshi Browse this author
	TSUBOI, Hideo Browse this author
	KUWAHARA, Kiyoshi Browse this author
	OGATA, Seiji Browse this author
Issue Date:	20-Aug-2010
Publisher:	Japan Society of Applied Physics
Journal Title:	Japanese Journal of Applied Physics
Volume:	49
Issue:	8
Start Page:	086001-1
End Page:	086001-5
Publisher DOI:	10.1143/JJAP.49.086001
Abstract:	A Monte Carlo simulation of electron transport in electric and magnetic fields was performed to analyze experimental data of the electron temperature T_e and electron number density n_e measured in a magnetic neutral loop discharge (NLD) plasma driven in Ar at 0.13 Pa. T_e and n_e in the vicinity of the substrate holder were measured with a triple probe, and their radial profiles had peaks at different radial positions. The simulation reproduced these peak positions well under the chosen boundary condition that the electron reflectivity of the side wall was lower than that of the reactor ceiling and the substrate holder. It was explained that the T_e peak was formed by high-energy electrons transported from the neutral loop along a separatrix of the quadrupole magnetic field and that the n_e peak consisted of electrons undergoing reciprocating motion between the reactor ceiling and the substrate.
Rights:	© 2010 The Japan Society of Applied Physics
Type:	article (author version)
URI:	http://hdl.handle.net/2115/44420
Appears in Collections:	情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 菅原広剛

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