Acid formation in polymer solids by radiation-induced chain reactions of diphenyliodonium salts


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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/44782

Title:	Acid formation in polymer solids by radiation-induced chain reactions of diphenyliodonium salts
Authors:	Koizumi, Hitoshi Browse this author
	Terae, Mitsuhiro Browse this author
	Yamazaki, Kenta Browse this author
	Iino, Kouji Browse this author
Keywords:	Iodonium salt
	γ-Radiation
	Acetals
	Polyvinyl acetals
	Chemically amplified resists
Issue Date:	Feb-2011
Publisher:	Elsevier
Journal Title:	Radiation Physics and Chemistry
Volume:	80
Issue:	2
Start Page:	190
End Page:	195
Publisher DOI:	10.1016/j.radphyschem.2010.07.031
Abstract:	In order to develop chemically amplified radiation resist having ability of acid multiplication, acid formation in γ-irradiated polymer films and solutions of acetal compounds containing diphenyliodonium salt has been studied. Acids were generated in the films and solutions by chain reactions of large G-value. The G-value depends on the chemical structure of the polymers and acetal compounds. Compounds containing cyclic acetal structure give large G-values. This dependence can be explained by difference in the possibility of the electron transfer from radicals of the polymers and acetal compounds to diphenyliodonium salt. Polyvinyl acetals will be a candidate for the dually amplified resist.
Type:	article (author version)
URI:	http://hdl.handle.net/2115/44782
Appears in Collections:	工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 小泉均

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