Self-Organized Two-Dimensional　Vidro-Nanodot　Array on Laser-Irradiated Si Surface


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Title:	Self-Organized Two-Dimensional　Vidro-Nanodot　Array on Laser-Irradiated Si Surface
Authors:	Yoshida, Yutaka Browse this author
	Sakaguchi, Norihito Browse this author
	Watanabe, Seiichi Browse this author
	Kato, Takahiko Browse this author
Issue Date:	May-2011
Publisher:	The Japan Society of Applied Physics
Journal Title:	Applied Physics Express
Volume:	4
Issue:	5
Start Page:	055202
Publisher DOI:	10.1143/APEX.4.055202
Abstract:	We report a periodic two-dimensional (2D) array of uniquely shaped dotlike nanoprotrusions (NPs), which simultaneously self-organize on a Si surface under pulsed laser irradiation. The shape of the dotlike NPs can be controlled by adjusting the number of laser pulses. The flask-shaped dotlike NP array is named a vidro-nanodot (VND) array. We present a detailed analysis of the internal structure of VND using high-resolution electron microscopy.
Rights:	©2011 The Japan Society of Applied Physics
Type:	article (author version)
URI:	http://hdl.handle.net/2115/45487
Appears in Collections:	工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 渡辺精一

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