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Self-Organized Two-Dimensional Vidro-Nanodot Array on Laser-Irradiated Si Surface

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Title: Self-Organized Two-Dimensional Vidro-Nanodot Array on Laser-Irradiated Si Surface
Authors: Yoshida, Yutaka Browse this author
Sakaguchi, Norihito Browse this author
Watanabe, Seiichi Browse this author
Kato, Takahiko Browse this author
Issue Date: May-2011
Publisher: The Japan Society of Applied Physics
Journal Title: Applied Physics Express
Volume: 4
Issue: 5
Start Page: 055202
Publisher DOI: 10.1143/APEX.4.055202
Abstract: We report a periodic two-dimensional (2D) array of uniquely shaped dotlike nanoprotrusions (NPs), which simultaneously self-organize on a Si surface under pulsed laser irradiation. The shape of the dotlike NPs can be controlled by adjusting the number of laser pulses. The flask-shaped dotlike NP array is named a vidro-nanodot (VND) array. We present a detailed analysis of the internal structure of VND using high-resolution electron microscopy.
Rights: ©2011 The Japan Society of Applied Physics
Type: article (author version)
URI: http://hdl.handle.net/2115/45487
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 渡辺 精一

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