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Synthesis characteristics of Cu particulates in high-pressure magnetron sputtering plasmas studied by in situ laser-light scattering
| Title: | Synthesis characteristics of Cu particulates in high-pressure magnetron sputtering plasmas studied by in situ laser-light scattering |
| Authors: | Nafarizal, N. Browse this author | | Sasaki, K. Browse this author →KAKEN DB |
| Issue Date: | 19-Dec-2012 |
| Publisher: | IOP Publishing |
| Journal Title: | Journal of Physics D: Applied Physics |
| Volume: | 45 |
| Issue: | 50 |
| Start Page: | 505202 |
| Publisher DOI: | 10.1088/0022-3727/45/50/505202 |
| Abstract: | This paper reports the temporal evolution, the dependence on the discharge conditions, and the spatial distribution of Cu particulates synthesized in high-pressure magnetron sputtering plasmas. The spatial distributions of the size and the density of particulates were examined with precision using a two-wavelength laser light scattering technique. We found that more than 50% of Cu particulates in the discharge space had sizes ranging between 100 and 175 nm. The absolute density of Cu particulate was on the order of 10^[7]-10^[9] cm^[-3]. Cu particulates had concentrated distributions in the boundary between the bright plasma and the dark region and in the region connecting to the anode of the magnetron sputtering source. The spatial distribution, the size distribution, and the density of Cu particulates were sensitively dependent on the discharge power and pressure. |
| Rights: | This is an author-created, un-copyedited version of an article accepted for publication in Journal of Physics D: Applied Physics. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at 10.1088/0022-3727/45/50/505202. |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/51153 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 佐々木 浩一
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