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Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution
| Title: | Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution |
| Authors: | Kikuchi, Tatsuya Browse this author →KAKEN DB | | Wachi, Yuhta Browse this author | | Sakairi, Masatoshi Browse this author →KAKEN DB | | Suzuki, Ryosuke O. Browse this author →KAKEN DB |
| Keywords: | Bulk micromachining | | Aluminum | | Anodizing | | Electrochemical etching | | Laser irradiation |
| Issue Date: | Nov-2013 |
| Publisher: | Elsevier |
| Journal Title: | Microelectronic Engineering |
| Volume: | 111 |
| Start Page: | 14 |
| End Page: | 20 |
| Publisher DOI: | 10.1016/j.mee.2013.05.007 |
| Abstract: | A well-defined microstructure with microchannels and a microchamber was fabricated on an aluminum plate by four steps of a new aluminum bulk micromachining process: anodizing, laser irradiation, electrochemical etching, and ultrasonication. An aluminum specimen was anodized in an oxalic acid solution to form a porous anodic oxide film. The anodized aluminum specimen was irradiated with a pulsed Nd-YAG laser to locally remove the anodic oxide film, and then the exposed aluminum substrate was selectively dissolved by electrochemical etching in an acetic acid/perchloric acid solution. The anodic oxide film showed good insulating properties as a resist mask during electrochemical etching in the solution. A hemicylindrical microgroove with thin free-standing anodic oxide on the groove was fabricated by electrochemical etching, and the groove showed a smooth surface with a calculated mean roughness of 0.2–0.3 μm. The free-standing oxides formed by electrochemical etching were easily removed from the specimen by ultrasonication in an ethanol solution. Microchannels 60 μm in diameter and 25 μm in depth connected to a microchamber were successfully fabricated on the aluminum. |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/53124 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 菊地 竜也
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