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Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution

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Title: Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution
Authors: Kikuchi, Tatsuya Browse this author →KAKEN DB
Wachi, Yuhta Browse this author
Sakairi, Masatoshi Browse this author →KAKEN DB
Suzuki, Ryosuke O. Browse this author →KAKEN DB
Keywords: Bulk micromachining
Aluminum
Anodizing
Electrochemical etching
Laser irradiation
Issue Date: Nov-2013
Publisher: Elsevier
Journal Title: Microelectronic Engineering
Volume: 111
Start Page: 14
End Page: 20
Publisher DOI: 10.1016/j.mee.2013.05.007
Abstract: A well-defined microstructure with microchannels and a microchamber was fabricated on an aluminum plate by four steps of a new aluminum bulk micromachining process: anodizing, laser irradiation, electrochemical etching, and ultrasonication. An aluminum specimen was anodized in an oxalic acid solution to form a porous anodic oxide film. The anodized aluminum specimen was irradiated with a pulsed Nd-YAG laser to locally remove the anodic oxide film, and then the exposed aluminum substrate was selectively dissolved by electrochemical etching in an acetic acid/perchloric acid solution. The anodic oxide film showed good insulating properties as a resist mask during electrochemical etching in the solution. A hemicylindrical microgroove with thin free-standing anodic oxide on the groove was fabricated by electrochemical etching, and the groove showed a smooth surface with a calculated mean roughness of 0.2–0.3 μm. The free-standing oxides formed by electrochemical etching were easily removed from the specimen by ultrasonication in an ethanol solution. Microchannels 60 μm in diameter and 25 μm in depth connected to a microchamber were successfully fabricated on the aluminum.
Type: article (author version)
URI: http://hdl.handle.net/2115/53124
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 菊地 竜也

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