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Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Information Science and Technology / Faculty of Information Science and Technology >
Peer-reviewed Journal Articles, etc >
Robust Surface Reconstruction in SEM Using Two BSE Detectors
| Title: | Robust Surface Reconstruction in SEM Using Two BSE Detectors |
| Authors: | Chen, Deshan Browse this author | | Miyamoto, Atsushi Browse this author | | Kaneko, Shun'ichi Browse this author →KAKEN DB |
| Keywords: | scanning electron microscope (SEM) | | surface reconstruction | | shadowing compensation | | backscattering electron |
| Issue Date: | Oct-2013 |
| Publisher: | Institute of Electronics, Information and Communication Engineers |
| Journal Title: | IEICE Transactions on Information and Systems |
| Volume: | E96D |
| Issue: | 10 |
| Start Page: | 2224 |
| End Page: | 2234 |
| Publisher DOI: | 10.1587/transinf.E96.D.2224 |
| Abstract: | This paper describes a robust three-dimensional (3D) surface reconstruction method that can automatically eliminate shadowing errors. For modeling shadowing effect, a new shadowing compensation model based on the angle distribution of backscattered electrons is introduced. Further, it is modified with respect to some practical factors. Moreover, the proposed iterative shadowing compensation method, which performs commutatively between the compensation of image intensities and the modification of the corresponding 3D surface, can effectively provide both an accurate 3D surface and compensated shadowless images after convergence. |
| Rights: | Copyright ©2013 The Institute of Electronics, Information and Communication Engineers |
| Relation: | http://search.ieice.org/ |
| Type: | article |
| URI: | http://hdl.handle.net/2115/54806 |
| Appears in Collections: | 情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 金子 俊一
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