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Robust Surface Reconstruction in SEM Using Two BSE Detectors

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この文献へのリンクには次のURLを使用してください:http://hdl.handle.net/2115/54806

タイトル: Robust Surface Reconstruction in SEM Using Two BSE Detectors
著者: Chen, Deshan 著作を一覧する
Miyamoto, Atsushi 著作を一覧する
Kaneko, Shun'ichi 著作を一覧する
キーワード: scanning electron microscope (SEM)
surface reconstruction
shadowing compensation
backscattering electron
発行日: 2013年10月
出版者: Institute of Electronics, Information and Communication Engineers
誌名: IEICE Transactions on Information and Systems
巻: E96D
号: 10
開始ページ: 2224
終了ページ: 2234
出版社 DOI: 10.1587/transinf.E96.D.2224
抄録: This paper describes a robust three-dimensional (3D) surface reconstruction method that can automatically eliminate shadowing errors. For modeling shadowing effect, a new shadowing compensation model based on the angle distribution of backscattered electrons is introduced. Further, it is modified with respect to some practical factors. Moreover, the proposed iterative shadowing compensation method, which performs commutatively between the compensation of image intensities and the modification of the corresponding 3D surface, can effectively provide both an accurate 3D surface and compensated shadowless images after convergence.
Rights: Copyright ©2013 The Institute of Electronics, Information and Communication Engineers
Relation (URI): http://search.ieice.org/
資料タイプ: article
URI: http://hdl.handle.net/2115/54806
出現コレクション:雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

提供者: 金子 俊一

 

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