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Robust Surface Reconstruction in SEM Using Two BSE Detectors

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/54806

Title: Robust Surface Reconstruction in SEM Using Two BSE Detectors
Authors: Chen, Deshan Browse this author
Miyamoto, Atsushi Browse this author
Kaneko, Shun'ichi Browse this author →KAKEN DB
Keywords: scanning electron microscope (SEM)
surface reconstruction
shadowing compensation
backscattering electron
Issue Date: Oct-2013
Publisher: Institute of Electronics, Information and Communication Engineers
Journal Title: IEICE Transactions on Information and Systems
Volume: E96D
Issue: 10
Start Page: 2224
End Page: 2234
Publisher DOI: 10.1587/transinf.E96.D.2224
Abstract: This paper describes a robust three-dimensional (3D) surface reconstruction method that can automatically eliminate shadowing errors. For modeling shadowing effect, a new shadowing compensation model based on the angle distribution of backscattered electrons is introduced. Further, it is modified with respect to some practical factors. Moreover, the proposed iterative shadowing compensation method, which performs commutatively between the compensation of image intensities and the modification of the corresponding 3D surface, can effectively provide both an accurate 3D surface and compensated shadowless images after convergence.
Rights: Copyright ©2013 The Institute of Electronics, Information and Communication Engineers
Relation: http://search.ieice.org/
Type: article
URI: http://hdl.handle.net/2115/54806
Appears in Collections:情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 金子 俊一

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