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Hydrogen desorption behavior of aluminium materials used for extremely high vacuum chamber
| Title: | Hydrogen desorption behavior of aluminium materials used for extremely high vacuum chamber |
| Authors: | Hirohata, Yuko1 Browse this author →KAKEN DB | | Fujimoto, Satoshi Browse this author | | Hino, Tomoaki Browse this author →KAKEN DB | | Yamashina, Toshiro Browse this author →KAKEN DB |
| Authors(alt): | 廣畑, 優子1 |
| Issue Date: | Sep-1993 |
| Publisher: | AVS Science & Technology of Materials, Interfaces, and Processing |
| Journal Title: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films |
| Volume: | 11 |
| Issue: | 5 |
| Start Page: | 2637 |
| End Page: | 2641 |
| Publisher DOI: | 10.1116/1.578618 |
| Abstract: | Hydrogen desorption properties of pure Al metal (1050H24 and 1001 Al) and Al alloy (6063T6) were investigated by using a technique of thermal desorption spectroscopy (TDS). In the TDS spectrum of hydrogen, two peaks in the temperature, which may correspond to the desorptions due to second-order surface reaction and diffusion process, were observed. The activation energy of the desorption, due to the surface reaction for the 1050H24 Al, was obtained as 38 kJ/mol. For the 1001 Al, by using a simple diffusion model, the activation energy and diffusion constant of hydrogen due to the diffusion process were calculated as 50 kJ/mol and (0.5–3.5)×10–3 cm2/s, respectively. The hydrogen desorption amount of the Al alloy was estimated as 3×1015 mol/cm2 (0.159 cc/100g Al), which was twice compared with that of the 1050H24 Al. Secondary-ion mass spectroscopy (SIMS) analysis was applied to examine the change of the surface atomic composition after baking. It was found that magnesium was considerably segregated by heating. However, the correlation between the concentrations of hydrogen and magnesium was not clearly observed. |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/5735 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 廣畑 優子
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