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Size, density, and shape of InAs quantum dots in closely stacked multilayers grown by the Stranski-Krastanow mode

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タイトル: Size, density, and shape of InAs quantum dots in closely stacked multilayers grown by the Stranski-Krastanow mode
著者: Shiramine, Ken-ichi 著作を一覧する
Muto, Shunichi 著作を一覧する
Shibayama, Tamaki 著作を一覧する
Takahashi, Heishichiro 著作を一覧する
Kozaki, Tamotsu 著作を一覧する
Sato, Seichi 著作を一覧する
Nakata, Yoshiaki 著作を一覧する
Yokoyama, Naoki 著作を一覧する
発行日: 2003年 9月
出版者: American Vacuum Society
誌名: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
巻: 21
号: 5
開始ページ: 2054
終了ページ: 2059
出版社 DOI: 10.1116/1.1605429
抄録: Closely stacked multilayer structures of InAs islands with intermediate-layer thicknesses d of 3, 6, 10, and 20 nm were grown by the Stranski-Krastanow mode of molecular beam epitaxy and were observed using transmission electron microscopy (TEM) and atomic force microscopy (AFM). The multilayers consisted of five InAs layers each of a thickness of 1.8 monolayers and four GaAs layers each of a thickness d. Columns of coherent islands were observed by cross-sectional TEM. Changes in the size and density of the islands with d, determined by AFM, could be explained in terms of (i) change in the vertical pairing probability of islands, (ii) detachment of In from the top of the island, and (iii) surface segregation of In. The observed AFM images of the islands were elliptical. Their major axis was in the [110] direction, and the length of the minor axis was 80% of that of the major axis.
資料タイプ: article
URI: http://hdl.handle.net/2115/5856
出現コレクション:雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

提供者: 白峰 賢一

 

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