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In Situ Transmission Electron Microscopy for Electronics

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/59786

Title: In Situ Transmission Electron Microscopy for Electronics
Authors: Arita, Masashi Browse this author →KAKEN DB
Hamada, Kouichi Browse this author
Takahashi, Yasuo Browse this author →KAKEN DB
Sueoka, Kazuhisa Browse this author →KAKEN DB
Shibayama, Tamaki Browse this author
Keywords: In situ TEM
TEM sample holder
electromigration
magnetoresistance
tunnel conduction
resistive RAM
Issue Date: 2-Sep-2015
Publisher: InTech
Citation: Masashi Arita, Kouichi Hamada, Yasuo Takahashi, Kazuhisa Sueoka and Tamaki Shibayama (2015). In Situ Transmission Electron Microscopy for Electronics, The Transmission Electron Microscope - Theory and Applications, Dr. Khan Maaz (Ed.), ISBN: 978-953-51-2150-3, InTech, DOI: 10.5772/60651. Available from: http://www.intechopen.com/books/the-transmission-electron-microscope-theory-and-applications/in-situ-transmission-electron-microscopy-for-electronics
Start Page: 35
End Page: 68
Publisher DOI: 10.5772/60651
Abstract: Electronic devices are strongly influenced by their microstructures. In situ transmission electron microscopy (in situ TEM) with capability to measure electrical properties is an effective method to dynamically correlate electric properties with microstructures. We have developed tools and in situ TEM experimental procedures for measuring electronic devices, including TEM sample holders and sample preparation methods. The method was used to study metallic nanowire by electromigration, magnetoresistance of a ferromagnetic device, conductance quantization of a metallic nanowire, single electron tunnelling, and operation details of resistive random access memories (ReRAM).
Rights: http://creativecommons.org/licenses/by-nc/3.0/
Type: bookchapter
URI: http://hdl.handle.net/2115/59786
Appears in Collections:情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 有田 正志

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