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In Situ Transmission Electron Microscopy for Electronics
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Title: | In Situ Transmission Electron Microscopy for Electronics |
Authors: | Arita, Masashi Browse this author →KAKEN DB | Hamada, Kouichi Browse this author | Takahashi, Yasuo Browse this author →KAKEN DB | Sueoka, Kazuhisa Browse this author →KAKEN DB | Shibayama, Tamaki Browse this author |
Keywords: | In situ TEM | TEM sample holder | electromigration | magnetoresistance | tunnel conduction | resistive RAM |
Issue Date: | 2-Sep-2015 |
Publisher: | InTech |
Citation: | Masashi Arita, Kouichi Hamada, Yasuo Takahashi, Kazuhisa Sueoka and Tamaki Shibayama (2015). In Situ Transmission Electron Microscopy for Electronics, The Transmission Electron Microscope - Theory and Applications, Dr. Khan Maaz (Ed.), ISBN: 978-953-51-2150-3, InTech, DOI: 10.5772/60651. Available from: http://www.intechopen.com/books/the-transmission-electron-microscope-theory-and-applications/in-situ-transmission-electron-microscopy-for-electronics |
Start Page: | 35 |
End Page: | 68 |
Publisher DOI: | 10.5772/60651 |
Abstract: | Electronic devices are strongly influenced by their microstructures. In situ transmission electron microscopy (in situ TEM) with capability to measure electrical properties is an effective method to dynamically correlate electric properties with microstructures.
We have developed tools and in situ TEM experimental procedures for measuring electronic devices, including TEM sample holders and sample preparation methods. The method was used to study metallic nanowire by electromigration, magnetoresistance of a ferromagnetic device, conductance quantization of a metallic nanowire, single electron tunnelling, and operation details of resistive random access memories (ReRAM). |
Rights: | http://creativecommons.org/licenses/by-nc/3.0/ |
Type: | bookchapter |
URI: | http://hdl.handle.net/2115/59786 |
Appears in Collections: | 情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 有田 正志
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