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Using Laser Interference Lithography in the Fabrication of a Simplified Micro and Nanofluidic Device for Label-free Detection
Title: | Using Laser Interference Lithography in the Fabrication of a Simplified Micro and Nanofluidic Device for Label-free Detection |
Authors: | Ajiri, Taiga Browse this author | Kasa, Haruya Browse this author | Maeki, Masatoshi Browse this author | Ishida, Akihiko Browse this author | Tani, Hirofumi Browse this author | Nishi, Junji Browse this author | Tokeshi, Manabu Browse this author →KAKEN DB |
Keywords: | Label-free detection | nanofluidic device | diffraction grating | laser interference lithography | photolithography |
Issue Date: | Oct-2017 |
Publisher: | 日本分析化学会 |
Journal Title: | Analytical sciences |
Volume: | 33 |
Issue: | 10 |
Start Page: | 1197 |
End Page: | 1199 |
Publisher DOI: | 10.2116/analsci.33.1197 |
PMID: | 28993597 |
Abstract: | Recently, we developed a label-free detection method based on optical diffraction, and implemented it in on our fabricated micro- and nanofluidic device. This detection method is simple and useful for detecting biomolecules, but the device fabrication consists of complicated processes. In this paper, we propose a simple method for fabricating the micro- and nanofluidic device; the fabrication combines laser interference lithography with conventional photolithography. The performance of a device fabricated by the proposed method is comparable to the performance of the device in our previous study. |
Type: | article |
URI: | http://hdl.handle.net/2115/67853 |
Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 渡慶次 学
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