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Using Laser Interference Lithography in the Fabrication of a Simplified Micro and Nanofluidic Device for Label-free Detection

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/67853

Title: Using Laser Interference Lithography in the Fabrication of a Simplified Micro and Nanofluidic Device for Label-free Detection
Authors: Ajiri, Taiga Browse this author
Kasa, Haruya Browse this author
Maeki, Masatoshi Browse this author
Ishida, Akihiko Browse this author
Tani, Hirofumi Browse this author
Nishi, Junji Browse this author
Tokeshi, Manabu Browse this author →KAKEN DB
Keywords: Label-free detection
nanofluidic device
diffraction grating
laser interference lithography
photolithography
Issue Date: Oct-2017
Publisher: 日本分析化学会
Journal Title: Analytical sciences
Volume: 33
Issue: 10
Start Page: 1197
End Page: 1199
Publisher DOI: 10.2116/analsci.33.1197
PMID: 28993597
Abstract: Recently, we developed a label-free detection method based on optical diffraction, and implemented it in on our fabricated micro- and nanofluidic device. This detection method is simple and useful for detecting biomolecules, but the device fabrication consists of complicated processes. In this paper, we propose a simple method for fabricating the micro- and nanofluidic device; the fabrication combines laser interference lithography with conventional photolithography. The performance of a device fabricated by the proposed method is comparable to the performance of the device in our previous study.
Type: article
URI: http://hdl.handle.net/2115/67853
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 渡慶次 学

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