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Design of a patterned nanostructure array using a nanosecond pulsed laser

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Title: Design of a patterned nanostructure array using a nanosecond pulsed laser
Authors: Yoshida, Yutaka Browse this author
Ohnishi, Ko Browse this author
Matsuo, Yasutaka Browse this author →KAKEN DB
Watanabe, Seiichi Browse this author →KAKEN DB
Issue Date: Apr-2018
Publisher: American Institute of Physics (AIP)
Journal Title: AIP Advances
Volume: 8
Issue: 4
Start Page: 045122
Publisher DOI: 10.1063/1.5027060
Abstract: For design the patterned nanostructure array (PNSA) on material surface using a nanosecond pulsed laser, we investigated the influence of phase shift between scattered lights on silicon (Si) substrate using 30-nm-wide gold lines (GLs) spacings. At a spacing of 5,871 nm, ten nanodot (ND) arrays were formed at intervals of 533 nm by nanosecond pulsed laser. The results show that the formation of the PNSA was affected by the resonance of scattered light. We conclude that ND arrays were formed with a spacing of Lambda = n lambda. And we have designed PNSA comprising two ND arrays on the substrate. The PNSA with dimensions of 1,600 nm x 1,600 nm was prepared using GLs.
Type: article
Appears in Collections:エネルギー・マテリアル融合領域研究センター (Center for Advanced Research of Energy and Material) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

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