A thermocouple-based remote temperature controller of an electrically-floated sample for plasma CVD of nanocarbons with bias voltage


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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/73882

Title:	A thermocouple-based remote temperature controller of an electrically-floated sample for plasma CVD of nanocarbons with bias voltage
Authors:	Shimada, Toshihiro Browse this author →KAKEN DB
	Miura, Takuya Browse this author
	Xie, Wei Browse this author
	Yanase, Takashi Browse this author
	Nagahama, Taro Browse this author
Keywords:	Temperature measurement
	Plasma CVD
	Carbon nanomaterial
	Emissivity
	Pyrometer
	Thermocouple
Issue Date:	May-2017
Publisher:	Elsevier
Journal Title:	Measurement
Volume:	102
Start Page:	244
End Page:	248
Publisher DOI:	10.1016/j.measurement.2017.02.012
Abstract:	We report an accurate and easy-to operate instrument for the temperature control of an electrically floated sample using a thermocouple in direct contact with it. The signal was transmitted via 2.45 GHz WiFi. We measured and analyzed the discrepancy between the thermocouple and a radiation thermometer for the plasma CVD of carbon nanomaterials under sample bias. A successful protection method from abnormal discharge in the plasma is also provided. (C) 2017 Elsevier Ltd. All rights reserved.
Rights:	© 2017. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
Rights:	http://creativecommons.org/licenses/by-nc-nd/4.0/
Type:	article (author version)
URI:	http://hdl.handle.net/2115/73882
Appears in Collections:	工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 島田敏宏

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