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A thermocouple-based remote temperature controller of an electrically-floated sample for plasma CVD of nanocarbons with bias voltage

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Title: A thermocouple-based remote temperature controller of an electrically-floated sample for plasma CVD of nanocarbons with bias voltage
Authors: Shimada, Toshihiro Browse this author →KAKEN DB
Miura, Takuya Browse this author
Xie, Wei Browse this author
Yanase, Takashi Browse this author
Nagahama, Taro Browse this author
Keywords: Temperature measurement
Plasma CVD
Carbon nanomaterial
Emissivity
Pyrometer
Thermocouple
Issue Date: May-2017
Publisher: Elsevier
Journal Title: Measurement
Volume: 102
Start Page: 244
End Page: 248
Publisher DOI: 10.1016/j.measurement.2017.02.012
Abstract: We report an accurate and easy-to operate instrument for the temperature control of an electrically floated sample using a thermocouple in direct contact with it. The signal was transmitted via 2.45 GHz WiFi. We measured and analyzed the discrepancy between the thermocouple and a radiation thermometer for the plasma CVD of carbon nanomaterials under sample bias. A successful protection method from abnormal discharge in the plasma is also provided. (C) 2017 Elsevier Ltd. All rights reserved.
Rights: © 2017. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
http://creativecommons.org/licenses/by-nc-nd/4.0/
Type: article (author version)
URI: http://hdl.handle.net/2115/73882
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 島田 敏宏

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