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Micropatterning of Inorganic-Organic Hybrid Thick Films from Vinyltriethoxysilane

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Title: Micropatterning of Inorganic-Organic Hybrid Thick Films from Vinyltriethoxysilane
Other Titles: ビニルトリエトキシシランから作製した無機-有機ハイブリッド厚膜の微細パターニング
Authors: TADANAGA, Kiyoharu1 Browse this author →KAKEN DB
SUEKI, Toshitsugu2 Browse this author
MATSUDA, Atsunori3 Browse this author
MINAMI, Tsutomu4 Browse this author
TATSUMISAGO, Masahiro5 Browse this author
Authors(alt): 忠永, 清治1
末木, 俊次2
松田, 厚範3
南, 努4
辰巳砂, 昌弘5
Keywords: Inorganic-organic hybrids
UV irradiation
Issue Date: Jan-2006
Publisher: Ceramic Society of Japan
Journal Title: Journal of the Ceramic Society of Japan
Journal Title(alt): 日本セラミックス協会学術論文誌
Volume: 114
Issue: 1325
Start Page: 125
End Page: 127
Publisher DOI: 10.2109/jcersj.114.125
Abstract: Inorganic-organic hybrid films with a maximum thickness of about 40 μm were prepared from vinyltriethoxysilane (VTES) through a sol-gel process. UV light from a high-pressure mercury lamp was irradiated through a photomask on the hybrid films from VTES. IR and 29Si NMR spectra of the coating films showed that C=C bonds in VTES were polymerized by UV irradiation. Micropatterns with a maximum height of about 40 μm were formed by the etching of unirradiated area of the films.
Type: article
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 忠永 清治

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