Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
Peer-reviewed Journal Articles, etc >
Micropatterning of Inorganic-Organic Hybrid Thick Films from Vinyltriethoxysilane
This item is licensed under:Creative Commons Attribution-NoDerivatives 4.0 International
Title: | Micropatterning of Inorganic-Organic Hybrid Thick Films from Vinyltriethoxysilane |
Other Titles: | ビニルトリエトキシシランから作製した無機-有機ハイブリッド厚膜の微細パターニング |
Authors: | TADANAGA, Kiyoharu1 Browse this author →KAKEN DB | SUEKI, Toshitsugu2 Browse this author | MATSUDA, Atsunori3 Browse this author | MINAMI, Tsutomu4 Browse this author | TATSUMISAGO, Masahiro5 Browse this author |
Authors(alt): | 忠永, 清治1 | 末木, 俊次2 | 松田, 厚範3 | 南, 努4 | 辰巳砂, 昌弘5 |
Keywords: | Inorganic-organic hybrids | Mciropatterning | UV irradiation | Vinyltriethoxysilane |
Issue Date: | Jan-2006 |
Publisher: | Ceramic Society of Japan |
Journal Title: | Journal of the Ceramic Society of Japan |
Journal Title(alt): | 日本セラミックス協会学術論文誌 |
Volume: | 114 |
Issue: | 1325 |
Start Page: | 125 |
End Page: | 127 |
Publisher DOI: | 10.2109/jcersj.114.125 |
Abstract: | Inorganic-organic hybrid films with a maximum thickness of about 40 μm were prepared from vinyltriethoxysilane (VTES) through a sol-gel process. UV light from a high-pressure mercury lamp was irradiated through a photomask on the hybrid films from VTES. IR and 29Si NMR spectra of the coating films showed that C=C bonds in VTES were polymerized by UV irradiation. Micropatterns with a maximum height of about 40 μm were formed by the etching of unirradiated area of the films. |
Rights: | https://creativecommons.org/licenses/by-nd/4.0/deed.ja |
Type: | article |
URI: | http://hdl.handle.net/2115/73946 |
Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
|
Submitter: 忠永 清治
|