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Structural Changes in RSiO3/2-TiO2 Hybrid Films with UV Irradiation and Their Photocatalytic Micropatterning

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Title: Structural Changes in RSiO3/2-TiO2 Hybrid Films with UV Irradiation and Their Photocatalytic Micropatterning
Other Titles: 紫外線照射によるRSiO3/2-TiO2系ハイブリッド膜の構造変化と光触媒作用によるマイクロパターニング
Authors: SASAKI, Teruyuki1 Browse this author
MATSUDA, Atsunori2 Browse this author
TADANAGA, Kiyoharu3 Browse this author →KAKEN DB
TATSUMISAGO, Masahiro4 Browse this author
Authors(alt): 佐々木, 輝幸1
松田, 厚範2
忠永, 清治3
辰巳砂, 昌弘4
Keywords: Micropattern
UV irradiation
Issue Date: Aug-2005
Publisher: Ceramic Society of Japan
Journal Title: Journal of the Ceramic Society of Japan
Journal Title(alt): 日本セラミックス協会学術論文誌
Volume: 113
Issue: 1320
Start Page: 519
End Page: 524
Publisher DOI: 10.2109/jcersj.113.519
Abstract: UV light irradiation induced structural changes of the cleavage of silicon-carbon bonds and elimination of organic groups in organosilsesquioxane-titania (RSiO3/2-TiO2, R=methyl, ethyl, phenyl and benzyl) hybrid films due to the photocatalytic effect of TiO2 component. Phenyl and benzyl groups tended to remain in the films after the cleavage of Si-C bonds presumably due to their higher stability of aromatic rings and lager steric effect. The refractive index and dynamic hardness of all the hybrid films increased, and the thickness and contact angle for water decreased by the structural changes induced by the UV light irradiation. On the basis of these changes in film properties, micropatterning was successfully performed on the RSiO3/2-TiO2 hybrid films by UV light irradiation through a photomask. The micropatterns thus obtained should be applicable to a printing plate using the surface energy differences as well as a micro-optical component using the surface profiles and refractive index changes.
Type: article
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 忠永 清治

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