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J. Jpn. Inst. Met. 59(9) 973.pdf453.43 kBPDFView/Open
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Title: 二次イオン質量分析法(SIMS)によるチタン中微量酸素の局所定量分析
Other Titles: Local Quantitative SIMS Analysis of Small Amount of Oxygen in Titanium
Authors: 竹下, 博之1 Browse this author
冨井, 洋一2 Browse this author
鈴木, 亮輔3 Browse this author
小野, 勝敏4 Browse this author
Authors(alt): Takeshita, Hiroyuki T.1
Tomii, Yoichi2
Suzuki, Ryosuke O.3
Ono, Katsutoshi4
Keywords: secondary ion mass spectrometry
oxygen analysis
energy profile
cluster ion
quantitative analysis
Issue Date: 1-Sep-1995
Publisher: 日本金属学会
Journal Title: 日本金属学会誌
Journal Title(alt): Journal of the Japan Institute of Metals
Volume: 59
Issue: 9
Start Page: 973
End Page: 977
Publisher DOI: 10.2320/jinstmet1952.59.9_973
Abstract: Local quantitaive analysis of small amounts of oxygen in titanium was studied using the secondary ion mass spectrometry (SIMS). Cs+ ion was used for the primary ion beam, and 16O−, 64TiO− and 96Ti2− for the secondary ones. The intensity profiles of the secondary ions against energy at sputtering (energy profile) showed a good similarity between the cluster ions, i.e., TiO− and Ti2−. The precision of oxygen analysis was improved due to the similar energy profiles of the two analytical ions. Using the high energy resolution of mass spectrometer and the stable extraction voltage of secondary ions, the effect by mismatching in the energy profiles was reduced. The relative standard deviation of the ion intensity ratio I[64TiO−]⁄I[96TiO2−] was suppressed less than 10% over the oxygen concentration of 23 to 1540 mass ppm.
Type: article
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 鈴木 亮輔

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