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Hokkaido University Collection of Scholarly and Academic Papers >
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Peer-reviewed Journal Articles, etc >
Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation
| Title: | Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-Situ Heating TEM Observation |
| Authors: | Ii, Seiichiro Browse this author | | Hirota, Takeshi Browse this author | | Fujimoto, Kensuke Browse this author | | Sugimoto, Youhei Browse this author | | Takata, Naoki Browse this author | | Ikeda, Ken-ichi Browse this author →KAKEN DB | | Nakashima, Hideharu Browse this author | | Nakashima, Hiroshi Browse this author |
| Keywords: | aluminum induced crystallization | | polycrystalline silicon thin film | | transmission electron microscopy | | in-situ heating observation | | metastable state |
| Issue Date: | 1-Apr-2008 |
| Publisher: | The Japan Institute of Metals |
| Journal Title: | MATERIALS TRANSACTIONS |
| Volume: | 49 |
| Issue: | 4 |
| Start Page: | 723 |
| End Page: | 727 |
| Publisher DOI: | 10.2320/matertrans.MRA2007312 |
| Abstract: | The formation behavior of polycrystalline silicon thin films during the aluminum induced crystallization (AIC) process was investigated by scanning transmission electron microscopy (STEM) and in-situ heating transmission electron microscopy (TEM) observations. The STEM observation and electron dispersive X-ray spectroscopy (EDS) analysis of ex-situ heat-treated specimen revealed that the a-Si layer and Al layer switched the positions with each other during the heat treatment, resulting the crystallization of the a-Si layer. Furthermore, the in-situ heating TEM observation and EDS analysis of as-deposited specimen revealed the mixed state of Si and Al in an a-Si/Al film and the lateral growth of crystalline Si grain during the heating. The mechanism of AIC and switching layers were also discussed from the experimental results and the binary phase diagram of Al-Si system. |
| Type: | article |
| URI: | http://hdl.handle.net/2115/75557 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 池田 賢一
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