Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry


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Appl. Phys. Express_12(8)_085005.pdf

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Please use this identifier to cite or link to this item:http://hdl.handle.net/2115/78865

Title:	Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry
Authors:	Nagata, Kosuke Browse this author
	Bajo, Ken-ichi Browse this author
	Itose, Satoru Browse this author
	Matsuya, Miyuki Browse this author
	Ishihara, Morio Browse this author
	Uchino, Kiichiro Browse this author
	Yurimoto, Hisayoshi Browse this author →KAKEN DB
Issue Date:	1-Aug-2019
Publisher:	IOP Publishing
Journal Title:	Applied Physics Express (APEX)
Volume:	12
Issue:	8
Start Page:	085005
Publisher DOI:	10.7567/1882-0786/ab30e4
Abstract:	A chromatic and spherical aberration corrector with liquid Ga ion metal source was developed. The aberration corrector reduced the ion probe diameter to similar to 1.5 times smaller for the Ga-69(+) beam in aberration correction mode compared with the corrector in non-aberration correction mode. The probe current at a given probe size is approximately two times larger in aberration correction mode than in non-aberration correction mode. The aberration-corrected focused ion beam yields higher lateral resolutions and higher sensitivities with lower acceleration voltage for the same acquisition time down to 10 nm with a current of 1 pA. (C) 2019 The Japan Society of Applied Physics
Type:	article (author version)
URI:	http://hdl.handle.net/2115/78865
Appears in Collections:	理学院・理学研究院 (Graduate School of Science / Faculty of Science) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 圦本尚義

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