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Smooth Interfacial Scavenging for Resistive Switching Oxide via the Formation of Highly Uniform Layers of Amorphous TaOx

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Title: Smooth Interfacial Scavenging for Resistive Switching Oxide via the Formation of Highly Uniform Layers of Amorphous TaOx
Authors: Tsurumaki-Fukuchi, Atsushi Browse this author
Nakagawa, Ryosuke Browse this author
Arita, Masashi Browse this author →KAKEN DB
Takahashi, Yasuo Browse this author →KAKEN DB
Keywords: oxygen defect
scavenging layer
tantalum oxide
SrTiO3
resistive switching
Issue Date: 22-Jan-2018
Journal Title: ACS Applied Materials & Interfaces
Volume: 10
Issue: 6
Start Page: 5609
End Page: 5617
Publisher DOI: 10.1021/acsami.7b15384
Abstract: We demonstrate that the inclusion of a Ta interfacial layer is a remarkably effective strategy for forming interfacial oxygen defects at metal/oxide junctions. The insertion of an interfacial layer of a reactive metal, that is, a “scavenging” layer, has been recently proposed as a way to create a high concentration of oxygen defects at an interface in redox-based resistive switching devices, and growing interest has been given to the underlying mechanism. Through structural and chemical analyses of Pt/metal/SrTiO3/Pt structures, we reveal that the rate and amount of oxygen scavenging are not directly determined by the formation free energies in the oxidation reactions of the scavenging metal and unveil the important roles of oxygen diffusibility. Active oxygen scavenging and highly uniform oxidation via scavenging are revealed for a Ta interfacial layer with high oxygen diffusibility. In addition, the Ta scavenging layer is shown to exhibit a highly uniform structure and to form a very flat interface with SrTiO3, which are advantageous for the fabrication of a steep metal/oxide contact.
Rights: This document is the Accepted Manuscript version of a Published Work that appeared in final form in ACS applied materials & interfaces, copyright c American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://pubs.acs.org/doi/10.1021/acsami.7b15384.
Type: article
URI: http://hdl.handle.net/2115/79115
Appears in Collections:情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 福地 厚

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