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Phase-resolved profiles of electron energy deposition in inductively coupled radio-frequency plasmas driven under confronting divergent magnetic fields

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Title: Phase-resolved profiles of electron energy deposition in inductively coupled radio-frequency plasmas driven under confronting divergent magnetic fields
Authors: Nakashima, Katsuhiro Browse this author
Takahashi, Hironori Browse this author
Sugawara, Hirotake Browse this author →KAKEN DB
Issue Date: 16-Oct-2019
Publisher: Japan Society of Applied Physics
Journal Title: Japanese Journal of Applied Physics
Volume: 58
Issue: 11
Start Page: 116001-1
End Page: 116001-7
Publisher DOI: 10.7567/1347-4065/ab4481
Abstract: Electron motion in a cylindrical chamber under RF electric field and confronting divergent magnetic fields was simulated to evaluate the phase-resolved profiles of power deposition to electrons in a low-pressure inductively coupled magnetized plasma. There were three primary regions where the power deposition was high; a region near the RF antenna, a region near the sidewall, and a region of the partial resonance. The phase-resolved profiles of the electron energy gain G(t) and azimuthal electron velocity v θ (t) were obtained in every section defined in the chamber, and were fitted by functions with sinusoidal terms. The characteristics of G(t) and v θ (t), e.g. their asymmetry and directionality, particular to the position were discussed by comparisons between different regions with the fitting parameters and their factors, such as the amplitude of electric field, that of the azimuthal velocity, the power factor, and the phase differences from the RF electric field.
Rights: ©2019 The Japan Society of Applied Physics
Type: article (author version)
URI: http://hdl.handle.net/2115/79542
Appears in Collections:情報科学院・情報科学研究院 (Graduate School of Information Science and Technology / Faculty of Information Science and Technology) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 菅原 広剛

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