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Electron energy-loss spectroscopic evaluation of depth-dependent swelling of He+ ion-irradiated 4H-SiC correlated with defect type

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Title: Electron energy-loss spectroscopic evaluation of depth-dependent swelling of He+ ion-irradiated 4H-SiC correlated with defect type
Authors: Yang, Subing Browse this author
Nakagawa, Yuki Browse this author
Kondo, Minako Browse this author
Shibayama, Tamaki Browse this author →KAKEN DB
Issue Date: 7-May-2020
Publisher: American Institute of Physics (AIP)
Journal Title: Journal of Applied Physics
Volume: 127
Issue: 17
Start Page: 175106
Publisher DOI: 10.1063/1.5143399
Abstract: Various defects and amorphous transitions are the primary mechanism behind the accumulation of swelling in silicon carbide (SiC). In this study, selected-area He+ ion irradiation was carried out on single-crystal 4H-SiC using fluences of 1x10(15), 5x10(16), and 1x10(17)cm(-2) at room temperature. The defect distribution in the samples with varying irradiation fluences was analyzed using transmission electron microscopy (TEM), while the local swelling of regions under varying damage conditions was estimated using electron energy-loss spectroscopy. The results provide the range of swelling in SiC possessing different primary defect types, such as point defects or tiny clusters, black spot defects, and amorphous SiC. A saturation swelling with a value of 2%-3% in the near-surface region, induced by point defects or tiny clusters (invisible in TEM), was observed at room temperature over the fluence range of 1x10(15) to 1x10(17)cm(-2). This saturation has already reached at a great low dose of about 0.02dpa. The swelling of the region containing black spot defects ranges from about 3% to 7%. Helium bubbles increase the volume swelling of SiC, while the He+ ion irradiation may also perform a decreasing effect on the volume swelling below a certain irradiation fluence.
Rights: This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Applied Physics 127, 175106 (2020) and may be found at
Type: article
Appears in Collections:エネルギー・マテリアル融合領域研究センター (Center for Advanced Research of Energy and Material) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 柴山 環樹

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