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High-energy x-ray nanotomography introducing an apodization Fresnel zone plate objective lens

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Title: High-energy x-ray nanotomography introducing an apodization Fresnel zone plate objective lens
Authors: Takeuchi, Akihisa Browse this author
Uesugi, Kentaro Browse this author
Uesugi, Masayuki Browse this author
Toda, Hiroyuki Browse this author
Hirayama, Kyosuke Browse this author
Shimizu, Kazuyuki Browse this author
Matsuo, Koichi Browse this author
Nakamura, Takashi Browse this author →KAKEN DB
Issue Date: 1-Feb-2021
Publisher: American Institute of Physics (AIP)
Journal Title: Review of Scientific Instruments
Volume: 92
Issue: 2
Start Page: 023701
Publisher DOI: 10.1063/5.0020293
Abstract: In this study, high-energy x-ray nanotomography (nano-computed tomography, nano-CT) based on full-field x-ray microscopy was developed. Fine two-dimensional and three-dimensional (3D) structures with linewidths of 75 nm-100 nm were successfully resolved in the x-ray energy range of 15 keV-37.7 keV. The effective field of view was similar to 60 mu m, and the typical measurement time for one tomographic scan was 30 min-60 min. The optical system was established at the 250-m-long beamline 20XU of SPring-8 to realize greater than 100x magnification images. An apodization Fresnel zone plate (A-FZP), specifically developed for high-energy x-ray imaging, was used as the objective lens. The design of the A-FZP for high-energy imaging is discussed, and its diffraction efficiency distribution is evaluated. The spatial resolutions of this system at energies of 15 keV, 20 keV, 30 keV, and 37.7 keV were examined using a test object, and the measured values are shown to be in good agreement with theoretical values. High-energy x-ray nano-CT in combination with x-ray micro-CT is applied for 3D multiscale imaging. The entire bodies of bulky samples, similar to 1 mm in diameter, were measured with the micro-CT, and the nano-CT was used for nondestructive observation of regions of interest. Examples of multiscale CT measurements involving carbon steel, mouse bones, and a meteorite are discussed.
Rights: This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Akihisa Takeuchi, Kentaro Uesugi, Masayuki Uesugi, Hiroyuki Toda, Kyosuke Hirayama, Kazuyuki Shimizu, Koichi Matsuo, and Takashi Nakamura , "High-energy x-ray nanotomography introducing an apodization Fresnel zone plate objective lens", Review of Scientific Instruments 92, 023701 (2021) and may be found at
Type: article
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

Submitter: 中村 孝

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