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Photolithographic Fabrication of a Micro-electrode Surface on a Carbon Steel Sheet for Local Hydrogen Permeation Measurements

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Title: Photolithographic Fabrication of a Micro-electrode Surface on a Carbon Steel Sheet for Local Hydrogen Permeation Measurements
Authors: Fushimi, Koji Browse this author →KAKEN DB
Ishii, Nozomi Browse this author
Nakajima, Ayako Browse this author
Kitagawa, Yuichi Browse this author
Hasegawa, Yasuchika Browse this author
Matsuo, Yasutaka Browse this author
Keywords: photolithography
hydrogen permeation
hydrogen evolution reaction
Devanathan-Stachurski cell
Issue Date: 15-Apr-2021
Publisher: 一般社団法人 日本鉄鋼協会 (The Iron and Steel Institute of Japan)
Journal Title: ISIJ international
Volume: 61
Issue: 4
Start Page: 1112
End Page: 1119
Publisher DOI: 10.2355/isijinternational.ISIJINT-2020-316
Abstract: Microelectrodes for hydrogen permeation measurements were fabricated by photolithography. Although the application of a positive-type photoresist coating was effective for the formation of a circle-shaped pattern with a diameter of several tens of micrometers on an iron surface, the coating had poor adhesion to the iron surface and poor durability in an H2SO4 solution. However, the addition of a silica coating derived from tetraethoxysilane (TEOS) on the iron surface as an inner layer resulted in improvement of durability as well as resistance of the coating. Furthermore, the introduction of a layer derived from a mixture of TEOS and glycidyl 3-trimethoxysilylpropyl ether (GPTMS) between the inner layer derived from TEOS and the photoresist coating resulted in long durability showing a large impedance of more than 10(9) Omega cm(2) for 4x10(5) s in an H2SO4 solution. Cathodic polarization of the microelectrode on the iron surface revealed that the hydrogen evolution reaction (HER) rate is dependent on the plane orientation of the surface. HER rate on an SCM435 steel surface also strongly depended on the microstructure and hardness of the local surface.
Type: article
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

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