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A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range
| Title: | A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range |
| Authors: | Hong, Yifan Browse this author | | Sato, Ryo Browse this author | | Shimizu, Yuki Browse this author | | Matsukuma, Hiraku Browse this author | | Gao, Wei Browse this author |
| Keywords: | surface encoder | | scale grating | | reference grating | | Fizeau-type measurement method | | Z-directional measuring range |
| Issue Date: | Apr-2022 |
| Publisher: | MDPI |
| Journal Title: | Sensors |
| Volume: | 22 |
| Issue: | 8 |
| Start Page: | 3010 |
| Publisher DOI: | 10.3390/s22083010 |
| Abstract: | This paper proposes a new optical configuration for a two-axis surface encoder that can measure the in-plane (X-axis) and out-of-plane (Z-axis) displacements of a positioning stage. The two-axis surface encoder is composed of a scale grating and a sensor head. A transparent grating is employed in the sensor head for measurement of the Z-directional displacement of the scale grating based on the Fizeau-type measurement method; a reference beam reflected from the transparent grating and the zeroth-order diffracted beam from the scale grating are superimposed to generate an interference signal. A pair of prisms and a beam splitter are also employed in the sensor head, so that the positive and negative first-order diffracted beams can be superimposed over a long working distance to generate an interference signal for measurement of the X-directional displacement of the scale grating. Focusing on the new, extended Z-directional measurement mechanism, proof-of-principle experiments were carried out to verify the feasibility of the proposed optical configuration for the surface encoder that can measure the uni-directional displacements of a scale grating along the X- and Z-axis. Experimental results from the developed optical configuration demonstrated the achievement of a Z-directional measuring range of +/- 1.5 mm. |
| Type: | article |
| URI: | http://hdl.handle.net/2115/85493 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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