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Comparison among translational temperatures of He(P-1(1)o), He(S-3(1)), and Ar(4s [3/2](2)(o)) in inductively coupled plasmas
| Title: | Comparison among translational temperatures of He(P-1(1)o), He(S-3(1)), and Ar(4s [3/2](2)(o)) in inductively coupled plasmas |
| Authors: | Takada, Kosuke Browse this author | | Nishiyama, Shusuke Browse this author | | Sasaki, Koichi Browse this author →KAKEN DB |
| Issue Date: | 7-Jun-2021 |
| Publisher: | IOP Publishing |
| Journal Title: | Japanese Journal of Applied Physics (JJAP) |
| Volume: | 60 |
| Issue: | 6 |
| Start Page: | 066003 |
| Publisher DOI: | 10.35848/1347-4065/ac04f1 |
| Abstract: | We compared the translational temperatures of He(P-1(1)o), He(S-3(1)), and Ar(4s [3/2](2)(o)) in low-pressure inductively coupled plasmas. We employed laser absorption spectroscopy for measuring the Doppler broadening widths of the transition lines, and they told us the translational temperatures of the three electronic excited states. From the comparison between the temperatures of He(P-1(1)o) and He(S-3(1)), we confirmed that the metastable S-3(1) state can work as the probe for the temperature measurement of the ground state helium atoms. We observed higher temperatures for Ar(4s [3/2](2)(o)) than He(S-3(1)) in helium-argon mixture plasmas with total pressures less than 80 mTorr. The higher Ar(4s [3/2](2)(o)) temperature is considered to be due to the selective heating of argon by the charge exchange collision with Ar+. |
| Rights: | © [2021] The Japan Society of Applied Physics |
| Type: | article (author version) |
| URI: | http://hdl.handle.net/2115/85702 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 佐々木 浩一
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