Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
Peer-reviewed Journal Articles, etc >
Estimation of sheath electric field in inductively coupled hydrogen plasma on the basis of Doppler-broadened absorption spectrum of hydrogen Balmer-alpha line
Title: | Estimation of sheath electric field in inductively coupled hydrogen plasma on the basis of Doppler-broadened absorption spectrum of hydrogen Balmer-alpha line |
Authors: | Nishiyama, Shusuke Browse this author | Takada, Kosuke Browse this author | Sasaki, Koichi Browse this author →KAKEN DB |
Keywords: | stark spectroscopy | electric field measurement | laser absorption spectroscopy | hydrogen Balmer-alpha line |
Issue Date: | 1-Jul-2021 |
Publisher: | IOP Publishing |
Journal Title: | Japanese Journal of Applied Physics (JJAP) |
Volume: | 60 |
Issue: | 7 |
Start Page: | 076001 |
Publisher DOI: | 10.35848/1347-4065/ac075c |
Abstract: | We examined the applicability of the Doppler-broadened absorption spectrum of the hydrogen Balmer-alpha line to the estimation of the sheath electric field in plasma. The Stark splitting of the fine-structure components was calculated by solving the time-independent Schrodinger equation at various electric field strengths, and the theoretical absorption spectrum was obtained by the superposition of the fine-structure components with the same Doppler broadening widths. The spectrum of the Balmer-alpha line of atomic hydrogen, which was measured by standard diode laser absorption spectroscopy, was fitted with the theoretical spectrum. We succeeded in determining the translational temperature of atomic hydrogen, which was obtained from the Doppler broadening width, and the electric field strength by the spectral fitting. We have evaluated that the minimum electric field strength that can be detected by the present method is approximately 350 V cm(-1) when the translational temperature of atomic hydrogen is 400-500 K. |
Rights: | © [2021] The Japan Society of Applied Physics |
Type: | article (author version) |
URI: | http://hdl.handle.net/2115/85898 |
Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
|
Submitter: 佐々木 浩一
|