|
Hokkaido University Collection of Scholarly and Academic Papers >
Graduate School of Engineering / Faculty of Engineering >
Peer-reviewed Journal Articles, etc >
Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser
| Title: | Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser |
| Authors: | Sato, Ryo Browse this author | | Shimizu, Yuki Browse this author | | Matsukuma, Hiraku Browse this author | | Gao, Wei Browse this author |
| Keywords: | chromatic confocal probe | | confocal response curve | | dual-detector optical system | | a fiber-detector | | a mode-locked femtosecond laser | | the tracking local minimum method |
| Issue Date: | May-2022 |
| Publisher: | MDPI |
| Journal Title: | Applied sciences |
| Volume: | 12 |
| Issue: | 9 |
| Start Page: | 4736 |
| Publisher DOI: | 10.3390/app12094736 |
| Abstract: | This paper presents an intentional investigation of the effect of the object tilt angle on the tracking local minimum method (TL method), which is the one for detecting the measurement target position of the object optical axis, in a chromatic confocal probe employing a differential dual-fiber-detector optical system with a mode-locked femtosecond laser as the light source. The effect of the object tilt angle on dual-detector confocal probes, and even chromatic confocal probes, has not been investigated in detail so far, although the effect of object tilt angle on scanning confocal probes has been studied. At first, to examine the influence of the object tilt angle on the TL method, a theoretical model is established, and numerical simulations are performed based on the established theoretical equation. Then, the effect of aberrations in confocal optics on the confocal response curve is investigated in experiments. Finally, investigations on the effect of the object tilt angle on the TL method are demonstrated in experiments. |
| Rights: | © 2022 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0/). |
| Type: | article |
| URI: | http://hdl.handle.net/2115/86104 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
|
|
