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Hokkaido University Collection of Scholarly and Academic Papers >
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Peer-reviewed Journal Articles, etc >
Estimation of Vibrational Temperatures of N-2 and CO2 in Low-Pressure Electron Cyclotron Resonance Plasmas by Threshold Ionization Mass Spectrometry
| Title: | Estimation of Vibrational Temperatures of N-2 and CO2 in Low-Pressure Electron Cyclotron Resonance Plasmas by Threshold Ionization Mass Spectrometry |
| Authors: | Hosoyama, Shinnosuke Browse this author | | Yamazaki, Masahiro Browse this author | | Sasaki, Koichi Browse this author →KAKEN DB |
| Keywords: | threshold ionization mass spectrometry | | vibrational temperature | | molecular nitrogen | | carbon dioxide | | low-pressure plasma |
| Issue Date: | 15-Jul-2022 |
| Publisher: | The Japan Society of Plasma Science and Nuclear Fusion Research |
| Journal Title: | Plasma and Fusion Research |
| Volume: | 17 |
| Start Page: | 1406070 |
| Publisher DOI: | 10.1585/pfr.17.1406070 |
| Abstract: | This paper demonstrates the estimation of vibrational temperatures of N-2 and CO2 in low-pressure plasmas by threshold ionization mass spectrometry. The principle for the estimation is the decrease in the ionization potential by the vibrational excitation. We observed that the threshold ionization curves of N-2 and CO2, which were measured using a quadrupole mass spectrometer with an energy-variable electron beam, shifted toward the low-energy side, when they were sampled from the plasmas. We constructed a model which assumed a Boltzmann distribution for the population densities of vibrational excited states and the same cross sections of electron impact ionization for vibrational excited states except the shifts of the threshold energies. The vibrational temperatures were estimated by fitting the experimental threshold ionization curves with the model. |
| Type: | article |
| URI: | http://hdl.handle.net/2115/86325 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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Submitter: 佐々木 浩一
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