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Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

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Title: Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range
Authors: Hong, Yifan Browse this author
Sato, Ryo Browse this author
Shimizu, Yuki Browse this author →KAKEN DB
Matsukuma, Hiraku Browse this author
Shimizu, Hiroki Browse this author
Gao, Wei Browse this author
Keywords: reduction of crosstalk errors
multi-axis measurement
surface encoder
Z-directional measuring range
Michelson-type interferometer
Issue Date: 6-Dec-2022
Publisher: MDPI
Journal Title: Sensors
Volume: 22
Issue: 23
Start Page: 9563
Publisher DOI: 10.3390/s22239563
Abstract: A modified two-axis surface encoder is proposed to separately measure both the in-plane displacement and the Z-directional out-of-plane displacement with minor crosstalk errors. The surface encoder is composed of a scale grating and a small-sized sensor head. In the modified surface encoder, the measurement laser beam from the sensor head is designed to be projected onto the scale grating at a right angle. For measurement of the X- and Y-directional in-plane scale displacement, the positive and negative first-order diffracted beams from the scale grating are superimposed on each other in the sensor head, producing interference signals. On the other hand, the Z-directional out-of-plane scale displacement is measured based on the principle of a Michelson-type interferometer. To avoid the influence of reflection from the middle area of the transparent grating, which causes periodic crosstalk errors in the previous research, a specially fabricated transparent grating with a hole in the middle is employed in the newly designed optical system. A prototype sensor head is constructed, and basic performances of the modified surface encoder are tested by experiments.
Type: article
Appears in Collections:工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)

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