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Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range
| Title: | Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range |
| Authors: | Hong, Yifan Browse this author | | Sato, Ryo Browse this author | | Shimizu, Yuki Browse this author →KAKEN DB | | Matsukuma, Hiraku Browse this author | | Shimizu, Hiroki Browse this author | | Gao, Wei Browse this author |
| Keywords: | reduction of crosstalk errors | | multi-axis measurement | | surface encoder | | Z-directional measuring range | | Michelson-type interferometer |
| Issue Date: | 6-Dec-2022 |
| Publisher: | MDPI |
| Journal Title: | Sensors |
| Volume: | 22 |
| Issue: | 23 |
| Start Page: | 9563 |
| Publisher DOI: | 10.3390/s22239563 |
| Abstract: | A modified two-axis surface encoder is proposed to separately measure both the in-plane displacement and the Z-directional out-of-plane displacement with minor crosstalk errors. The surface encoder is composed of a scale grating and a small-sized sensor head. In the modified surface encoder, the measurement laser beam from the sensor head is designed to be projected onto the scale grating at a right angle. For measurement of the X- and Y-directional in-plane scale displacement, the positive and negative first-order diffracted beams from the scale grating are superimposed on each other in the sensor head, producing interference signals. On the other hand, the Z-directional out-of-plane scale displacement is measured based on the principle of a Michelson-type interferometer. To avoid the influence of reflection from the middle area of the transparent grating, which causes periodic crosstalk errors in the previous research, a specially fabricated transparent grating with a hole in the middle is employed in the newly designed optical system. A prototype sensor head is constructed, and basic performances of the modified surface encoder are tested by experiments. |
| Type: | article |
| URI: | http://hdl.handle.net/2115/87731 |
| Appears in Collections: | 工学院・工学研究院 (Graduate School of Engineering / Faculty of Engineering) > 雑誌発表論文等 (Peer-reviewed Journal Articles, etc)
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